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한국센서학회> 센서학회지> 비분산적외선 CO2 센서를 위한 DBR기반의 패브리 페로-필터 설계 및 성능 연구

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비분산적외선 CO2 센서를 위한 DBR기반의 패브리 페로-필터 설계 및 성능 연구

Design and performance study of fabry-perot filter based on DBR for a non-dispersive infrared carbon dioxide sensor

도남곤 ( Nam Gon Do ) , 이준엽 ( Junyeop Lee ) , 정동건 ( Dong Geon Jung ) , 공성호 ( Seong Ho Kong ) , 정대웅 ( Daewoong Jung )
  • : 한국센서학회
  • : 센서학회지 30권4호
  • : 연속간행물
  • : 2021년 07월
  • : 250-254(5pages)
센서학회지

DOI


목차

1. 서 론
2. 이론적 고찰 및 실험 방법
3. 결과 및 고찰
4. 결 론
감사의 글
REFERENCES

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A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 μm and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

UCI(KEPA)

간행물정보

  • : 공학분야  > 전기공학
  • : KCI등재
  • :
  • : 격월
  • : 1225-5475
  • : 2093-7563
  • : 학술지
  • : 연속간행물
  • : 1992-2021
  • : 1875


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1Effect of corrugation structure and shape on the mechanical stiffness of the diaphragm

저자 : Junsoo Kim , Wonkyu Moon

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 273-278 (6 pages)

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Here, we studied the change in the mechanical stiffness of a diaphragm according to the corrugation pattern. The diaphragm consists of a silicon oxide and nitride double layer; a corrugation pattern was formed by dry etching, and the diaphragm was released by wet etching. The fabrication of the thin film was verified using focused ion beam and scanning electron microscopy images. The mechanical stiffness of the diaphragm was obtained by measuring the surface vibration using a laser Doppler vibrometer while applying external sound pressure. Flat squares, diaphragms with square corrugations, and circular corrugation patterns were measured and compared. The stiffness of the diaphragm with a corrugation structure was found to be smaller than that without a corrugation structure; in particular, circular corrugation showed a better effect because of the high symmetry. Furthermore, the effect of corrugation was theoretically predicted. The proposed corrugated diaphragm showed comparable flexibility with the state-of-the-art MEMS microphone diaphragm.

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2Structural, morphological, optical, and photosensing properties of Cs2TeI6 thin film synthesized by two-step dry process

저자 : Phung Dinh Hoat , Vo Van Khoe , Sung-hoon Bae , Hyo-jun Lim , Pham Tien Hung , Young-woo Heo

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 279-285 (7 pages)

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Recently, cesium tellurium iodine (Cs2TeI6) has emerged as an inorganic halide perovskite material with potential application in optoelectronic devices due to its high absorption coefficient, suitable bandgap and because it consists of nontoxic and earth-abundant elements. However, studies on its fabrication process as well as photoresponse characteristics are limited. In this study, a simple and effective method is introduced for the synthesis of Cs2TeI6 thin films by a two-step dry process. A Cs2TeI6-based lateral photosensor was fabricated, and its photoresponse characteristics were explored under laser illuminations of four different wavelengths in the visible range: 405, 450, 520, and 655 nm. The initial photosensing results suggest potential application and can lead to more promising studies of Cs2TeI6 film in optoelectronics.

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3Lightweight image classifier for CIFAR-10

저자 : Akshay Kumar Sharma , Amrita Rana , Kyung Ki Kim

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 286-289 (4 pages)

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Image classification is one of the fundamental applications of computer vision. It enables a system to identify an object in an image. Recently, image classification applications have broadened their scope from computer applications to edge devices. The convolutional neural network (CNN) is the main class of deep learning neural networks that are widely used in computer tasks, and it delivers high accuracy. However, CNN algorithms use a large number of parameters and incur high computational costs, which hinder their implementation in edge hardware devices. To address this issue, this paper proposes a lightweight image classifier that provides good accuracy while using fewer parameters. The proposed image classifier diverts the input into three paths and utilizes different scales of receptive fields to extract more feature maps while using fewer parameters at the time of training. This results in the development of a model of small size. This model is tested on the CIFAR-10 dataset and achieves an accuracy of 90% using .26M parameters. This is better than the state-of-the-art models, and it can be implemented on edge devices.

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4Robust architecture search using network adaptation

저자 : Amrita Rana , Kyung Ki Kim

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 290-294 (5 pages)

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Experts have designed popular and successful model architectures, which, however, were not the optimal option for different scenarios. Despite the remarkable performances achieved by deep neural networks, manually designed networks for classification tasks are the backbone of object detection. One major challenge is the ImageNet pre-training of the search space representation; moreover, the searched network incurs huge computational cost. Therefore, to overcome the obstacle of the pre-training process, we introduce a network adaptation technique using a pre-trained backbone model tested on ImageNet. The adaptation method can efficiently adapt the manually designed network on ImageNet to the new object-detection task. Neural architecture search (NAS) is adopted to adapt the architecture of the network. The adaptation is conducted on the MobileNetV2 network. The proposed NAS is tested using SSDLite detector. The results demonstrate increased performance compared to existing network architecture in terms of search cost, total number of adder arithmetics (Madds), and mean Average Precision(mAP). The total computational cost of the proposed NAS is much less than that of the State Of The Art (SOTA) NAS method.

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5CMOS binary image sensor with high-sensitivity metal-oxide semiconductor field-effect transistor-type photodetector for high-speed imaging

저자 : Juneyoung Jang , Wonbin Heo , Jaesung Kong , Young-mo Kim , Jang-kyoo Shin

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 295-299 (5 pages)

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In this study, we present a complementary metal-oxide-semiconductor (CMOS) binary image sensor. It can shoot an object rotating at a high-speed by using a gate/body-tied (GBT) p-channel metal-oxide-semiconductor field-effect transistor (PMOSFET)-type photodetector. The GBT PMOSFET-type photodetector amplifies the photocurrent generated by light. Therefore, it is more sensitive than a standard N+/P-substrate photodetector. A binary operation is installed in a GBT PMOSFET-type photodetector with high-sensitivity characteristics, and the high-speed operation is verified by the output image. The binary operations circuit comprise a comparator and memory of 1- bit. Thus, the binary CMOS image sensor does not require an additional analog-to-digital converter. The binary CMOS image sensor is manufactured using a standard CMOS process, and its high- speed operation is verified experimentally.

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6DCGAN을 이용한 잡육에서의 바늘 검출

저자 : 장원재 ( Won-jae Jang ) , 차윤석 ( Yun-seok Cha ) , 금예은 ( Ye-eun Keum ) , 이예진 ( Ye-jin Lee ) , 김정도 ( Jeong-do Kim )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 300-308 (9 pages)

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Usually, during slaughter, the meat is divided into large chunks by part after deboning. The meat chunks are inspected for the presence of needles with an X-ray scanner. Although needles in the meat chunks are easily detectable, they can also be found in trimmings and meat offals, where meat skins, fat chunks, and pieces of meat from different parts get agglomerated. Detection of needles in trimmings and meat offals becomes challenging because of many needle-like patterns that are detected by the X-ray scanner. This problem can be solved by learning the trimmings or meat offals using deep learning. However, it is not easy to collect a large number of learning patterns in trimmings or meat offals. In this study, we demonstrate the use of deep convolutional generative adversarial network (DCGAN) to create fake images of trimmings or meat offals and train them using a convolution neural network (CNN).

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7유기발광소자에 적용 가능한 NiOx 기반의 정공주입층 연구

저자 : 김준모 ( Junmo Kim ) , 김예진 ( Yejin Gim ) , 이원호 ( Wonho Lee ) , 이동구 ( Donggu Lee )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 309-313 (5 pages)

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Organic semiconductors have received tremendous attention for their research because of their tunable electrical and optical properties that can be achieved by changing their molecular structure. However, organic materials are inherently unstable in the presence of oxygen and moisture. Therefore, it is necessary to develop moisture and air stable semiconducting materials that can replace conventional organic semiconductors. In this study, we developed a NiOx thin film through a solution process. The electrical characteristics of the NiOx thin film, depending on the thermal annealing temperature and UV-ozone treatment, were determined by applying them to the hole injection layer of an organic light-emitting diode. A high annealing temperature of 500 ℃ and UV-ozone treatment enhanced the conductivity of the NiOx thin films. The optimized NiOx exhibited beneficial hole injection properties comparable those of 1,4,5,8,9,11-hexaazatriphenylene hexacarbonitrile (HAT-CN), a conventional organic hole injection layer. As a result, both devices exhibited similar power efficiencies and the comparable electroluminescent spectra. We believe that NiOx could be a potential solution which can provide robustness to conventional organic semiconductors.

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8가변 파장형 적외선 가스 센서에 의한 생체표지자 분석

저자 : 이승환 ( Seung Hwan Yi )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 314-319 (6 pages)

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In this study, biomarkers were analyzed and segmented using tunable infrared gas sensors after performing the principal component analysis. The free spectral range of the device under test (DUT) was around 30 nm and DUT-5580 yielded the highest output voltage property among the others. The biomarkers (isoprophyl alcohol, ethanol, methanol, and acetone solutions) were sequentially mixed with deionized water and their mists were carried into the gas chamber using high-purity nitrogen gas. A total of 17 different mixed gases were tested with three tunable infrared gas sensors, namely DUT-3144, DUT-5580, and DUT-8010. DUT-8010 resolved the infrared absorption spectra of whole mixed gases. Based on the principal component analysis with each DUT and their combinations, each mixed gas and the trends in increasing gas concentration could be well analyzed when the contributions of the eigenvalues of the first and second were higher than 70% and 10%, respectively, and their sum was greater than 90%.

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9이산화티타늄 광촉매를 이용한 총유기탄소 분석방법

저자 : 박범근 ( Buem Keun Park ) , 김성미 ( Sung Mi Kim ) , 이영진 ( Young-jin Lee ) , 백종후 ( Jong-hoo Paik ) , 신정희 ( Jeong Hee Shin )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 320-325 (6 pages)

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Biochemical oxygen demand (BOD) and chemical oxygen demand (COD) methods are conventional analytical methods to analyze water quality. Both of these methods are technically indirect measurement methods, require complicated preconditions, and are timeconsuming. On the other hand, the total organic carbon (TOC) method is a direct and fast measurement method which is more intuitive and accurate than the BOD and COD methods. However, general TOC analysis methods involve complicated processes and high power consumption owing to the process of phase transition from liquid to gas by a high-temperature heater. Furthermore, periodic consumables are also required for the removal of inorganic carbon (IC). Titanium dioxide (TiO2) is one of the most suitable photocatalysts for simple processes. Its usage involves low power consumption because it only reacts with the organic carbon (OC) without the requirement of any other reagents and extra processes. We investigated a TiO2 photocatalyst-based TOC analysis for simple and affordable products. TiO2-coated fiber substrate maintained under carbon included water was exposed to ultraviolet (UV) radiation of wavelength 365 nm. This method is suitable for the real-time monitoring of water pollution because of its fast reaction time. Its linear property is also sufficient to match the real value.

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10소 혈청 알부민의 금 표면 플라즈몬 공명 칩과의 반응에 대한 pH의 영향

저자 : 손영수 ( Young-soo Sohn )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 5호 발행 연도 : 2021 페이지 : pp. 326-330 (5 pages)

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Reactions between gold (Au) surface plasmon resonance (SPR) chips and bovine serum albumin (BSA) dissolved in solutions of different pH were investigated. The charge on the BSA depends on the pH of the solution in which it is dissolved. Thus, dissolving BSA in different pH solutions resulted in different charges of BSA. Among the BSA dissolved in solutions with pH 4.01, 7.4, and 10.01, the SPR response was the highest for BSA dissolved in the solution of pH 4.01. To eliminate the response variation owing to the difference in the refractive indices of the solutions, phosphate buffered saline (PBS) was injected into the system after the reaction of BSA with the Au SPR chip had happened. In this case too, the BSA dissolved in the solution with pH 4.01 exhibited the highest response. This may be attributed to the non-uniform distribution of ionic patches on the BSA, which can induce electrostatic attraction to the surface even though BSA has a positive charge at pH 4.01, and the absolute values of the net charge of BSA at pH 4.01 and 7.4 were very close.

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1Highly sensitive xylene sensors using Fe2O3-ZnFe2O4 composite spheres

저자 : Jin Fang Chan , Jae Kyoung Jeon , Young Kook Moon , Jong-heun Lee

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 191-195 (5 pages)

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Pure ZnFe2O4 and Fe2O3-ZnFe2O4 hetero-composite spheres were prepared by ultrasonic spray pyrolysis of a solution containing Znand Fe-nitrates. Additionally, the sensing characteristics of these spheres in the presence of 5 ppm ethanol, benzene, p-xylene, toluene, and CO (within the temperature range of 275-350 ℃) were investigated. The Fe2O3-ZnFe2O4 hetero-composite sensor with a cation ratio of [Zn]:[Fe]=1:3 exhibited a high response (resistance ratio = 140.2) and selectivity (response to p-xylene/response to ethanol = 3.4) to 5 ppm p-xylene at 300 ℃, whereas the pure ZnFe2O4 sensor showed a comparatively lower gas response and selectivity. The reasons for the superior response and selectivity to p-xylene in Fe2O3-ZnFe2O4 hetero-composite sensor were discussed in relation to the electronic sensitization due to charge transfer at Fe2O3-ZnFe2O4 interface and Fe2O3-induced catalytic promotion of gas sensing reaction. The sensor can be used to monitor harmful volatile organic compounds and indoor air pollutants.

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2Design and implementation of optical identification system using visible light and infrared

저자 : Seong-ho Lee

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 196-203 (8 pages)

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In this study, an optical identification system was developed, wherein visible light is used to transmit the interrogating signal, and infrared is used to send the response signal. In the reader, visible light from a light emitting diode (LED) array was modulated via modified pulse width modulation for flicker-free illumination and dimming control. Moreover, the duty factor of the dimming control time was employed to control the illumination from the LED. In the transponder, the spike signal in the output of the high-pass filter was utilized to recover the interrogating signal while preventing interference from the 120-Hz noise from adjacent lighting lamps. The illumination was controlled in 26-86% range of the constant wave LED illumination by changing the duty factor from 20% to 90%. This configuration is advantageous for the construction of optical identification systems for automatic security check and car fare calculation at toll gates or parking facilities.

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3A case study to standardize odor metadata obtained from coffee aroma based on E-nose using ISO/IEC 23005 (MPEG-V) for olfactory-enhanced multimedia

저자 : Jang-sik Choi , Hyung-gi Byun

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 204-209 (6 pages)

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Immersive multimedia comprising metadata for five senses can provide user experience by stimulating memory and sensation. In the case of olfactory-enhanced multimedia, a computer-generated smell is combined with additional media content to create a richer and/ or more realistic experience for the user. Although several studies have been conducted on olfactory-enhanced multimedia using e-nose and olfactory display, their practical applications have been severely restricted owing to the absence of a related standard. This paper proposes a method to standardize odor metadata obtained from an e-nose system, which has been particularly used to acquire data from different coffee aromas. Subsequently, the data were transferred to an odor display applicable for olfactory-enhanced multimedia using the ISO/IEC 23005 (MPEG-V) data template.

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4α-Fe2O3 nanostructure-based gas sensors

저자 : Seonyong Lee , Ho Won Jang

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 210-217 (8 pages)

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Gas sensors based on semiconducting metal oxides have attracted considerable attention for various applications owing to their facile, cheap, and small-scale manufacturing processes. Hematite (α-Fe2O3) is widely considered as a promising candidate for a gas-sensing material owing to not only its abundance in the earth's crust and low price but also its chemical stability and suitable bandgap energy. However, only a few studies have been performed in this direction because of the low gas response and sluggish response of hematite-based gas sensors. Nanostructures present a representative solution to both overcome these disadvantages and exploit the desirable features to produce high-performance gas sensors. However, several challenges remain for adopting gas sensors based on metal oxide nanostructures, such as improving cost efficiency and facilitating mass production. This review summarizes the recent studies on gas sensors based on hematite nanostructures. It also provides useful insights into various strategies for enhancing the gas-sensing properties of gas sensors based on hematite nanostructures.

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5Designing a nanocrystal-based temperature and strain multi-sensor with one-step inkjet printing

저자 : Junsung Bang , Junhyuk Ahn , Soong Ju Oh

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 218-222 (5 pages)

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Wearable multi-sensors based on nanocrystals have attracted significant attention, and studies on patterning technology to implement such multi-sensors are underway. Conventional patterning processes may affect material properties based on high temperatures and harsh chemical conditions. In this study, we developed an inkjet printing technique that can overcome these drawbacks through the application of patterning processes at room temperature and atmospheric pressure. Nanocrystal-based ink is used to adjust properties efficiently. Additionally, the viscosity and surface tension of the solvents are investigated and optimized to increase patterning performance. In the patterning process, the electrical, electrothermal, and electromechanical properties of the nanocrystal pattern are controlled by the ligand exchange process. Experimental results demonstrate that a multi-sensor with a temperature coefficient of resistance of 3.82 × 10-3 K-1 and gauge factor of 30.6 can be successfully fabricated using one-step inkjet printing.

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6Low-Power CMOS image sensor with multi-column-parallel SAR ADC

저자 : Jang-Su Hyun , Hyeon-june Kim

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 223-228 (6 pages)

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This work presents a low-power CMOS image sensor (CIS) with a multi-column-parallel (MCP) readout structure while focusing on improving its performance compared to previous works. A delta readout scheme that utilizes the image characteristics is optimized for the MCP readout structure. By simply alternating the MCP readout direction for each row selection, additional memory for the rowto- row delta readout is not required, resulting in a reduced area of occupation compared to the previous work. In addition, the bias current of a pre-amplifier in a successive approximate register (SAR) analog-to-digital converter (ADC) changes according to the operating period to improve the power efficiency. The prototype CIS chip was fabricated using a 0.18-μm CMOS process. A 160 × 120 pixel array with 4.4 μm pitch was implemented with a 10-bit SAR ADC. The prototype CIS demonstrated a frame rate of 120 fps with a total power consumption of 1.92mW.

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7탄소나노튜브 대면적 어셈블리를 통한 고감도-고선택성 과산화수소 센서 개발

저자 : 이동욱 ( Dongwook Lee ) , 안희호 ( Heeho Ahn ) , 서병관 ( Byeong-Gwuan Seo ) , 이승우 ( Seung-woo Lee )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 229-235 (7 pages)

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This study presents a simple approach for the assembly of a free-standing conductive electronic nanofilm of single-walled carbon nanotubes (SWNTs) suitable for enzymatic electrochemical biosensors. A large-scale SWNT electronic film was successfully produced by the dialysis of p-Terphenyl-4,4´´-dithiol (TPDT)-treated SWNTs. Furthermore, Horseradish peroxidase (HRP) was immobilized on the TPDT-SWNT electronic film, and the enzymatic detection of hydrogen peroxide (H2O2) was demonstrated without mediators. The detection of H2O2 in the negative potential range (-0.4 V vs. Ag/AgCl) was achieved by direct electron transfer of heme-based enzymes that were immobilized on the TPDT-SWNT electronic film. The SWNT-based biosensor exhibited a wide detection range of H2O2 from 10 μM to 10mM. The HRP-doped SWNT electronic film achieved a high sensitivity of 342 μmA/mM·㎠ and excellent selectivity against a variety of redox-active interfering substances, such as ascorbic acid, uric acid, and acetaminophen.

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8CMOS 표준 공정을 통한 SPM 프로브의 제작 및 그 성능 평가

저자 : 이훈택 ( Hoontaek Lee ) , 김준수 ( Junsoo Kim ) , 신금재 ( Kumjae Shin ) , 문원규 ( Wonkyu Moon )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 236-242 (7 pages)

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In this paper, we report the fabrication of the tip-on-gate of a field-effect-transistor (ToGoFET) probe using a standard complementary metal-oxide-semiconductor (CMOS) process and the performance evaluation of the fabricated probe. After the CMOS process, I-V characteristic measurement was performed on the reference MOSFET. We confirmed that the ToGoFET probe could be operated at a gate voltage of 0 V due to channel ion implantation. The transconductance at the operating point (Vg = 0 V, Vd = 2 V) was 360 μA/ V. After the fabrication process was completed, calibration was performed using a pure metal sample. For sensitivity calibration, the relationship between the input voltage of the sample and the output current of the probe was determined and the result was consistent with the measurement result of the reference MOSFET. An oxide sample measurement was performed as an example of an application of the new ToGoFET probe. According to the measurement, the ToGoFET probe could spatially resolve a hundred nanometers with a height of a few nanometers in both the topographic image and the ToGoFET image.

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9분류식 습도 발생 장치 개발 및 라디오존데 습도센서 저온 효과 보정에 활용 연구

저자 : 장은정 ( Eun-jeong Jang ) , 이영석 ( Young-suk Lee ) , 최병일 ( Byung-il Choi ) , 최윤석 ( Yoonseuk Choi ) , 이상욱 ( Sang-wook Lee )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 243-249 (7 pages)

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Humidity is an important physical quantity that is closely related with the quality of everyday life as well as the quality control of products in various industries. Here, we have developed a divided-flow type humidity generator of which humidity generation is faster than the saturator-based humidity generator in ppm level. The operation principle of the divided-flow humidity generator is first introduced. Then, the performance of the divided-flow humidity generator is verified by testing the radiosonde humidity sensor at low temperature. As a result, the humidity generated from the divided-flow humidity generator is consistent with the saturator-based precision humidity generator within 1.6% relative humidity in the range from 10% to 40% at -45 ℃. It is also found that the radiosonde humidity sensor shows measurement errors by 3% - 5% at -45 ℃ when it is only calibrated at room temperature. The response times of radiosonde humidity sensor using the divided-flow humidity generator are between about 2 and 9 minutes, whereas those by the saturatorbased humidity generator are about 20 minutes. In this regard, the divided-flow humidity generator has a merit in terms of fast humidity changes for the calibration of radiosonde humidity sensors at low-temperatures.

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10비분산적외선 CO2 센서를 위한 DBR기반의 패브리 페로-필터 설계 및 성능 연구

저자 : 도남곤 ( Nam Gon Do ) , 이준엽 ( Junyeop Lee ) , 정동건 ( Dong Geon Jung ) , 공성호 ( Seong Ho Kong ) , 정대웅 ( Daewoong Jung )

발행기관 : 한국센서학회 간행물 : 센서학회지 30권 4호 발행 연도 : 2021 페이지 : pp. 250-254 (5 pages)

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A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 μm and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

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