Thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for probe-based data storage using wafer-Lever transfer method
김영식 ( Young Sik Kim ) , 장성수 ( Seong Soo Jang ) , 이선영 ( Sun Young Lee ) , 진원혁 ( Won Hyeoh Jin ) , 조일주 ( Il Joo Cho ) , 남효진 ( Hyo Jin Nam ) , 부종욱 ( Jong Uk Bu )
