The change of permeation mechanism from Knudsen diffusion to micropore diffusion was observed after CVD modification of an alumina-sol coated alumina support which was prepared by slip coating process. Permselectivities of He/N2, H2/N2, and CO2/N2 were 5.67, 5.02, and 1.44, respectively. These values were higher than those under Knudsen diffusion controlled region.