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스퍼터링법으로 제조된 Pd-doped $SnO_2$ 박막의 수소가스 감도 특성
The Hydrogen Gas Sensing Characteristics of the Pd-doped $SnO_2$ Thin Films Prepared by Sputtering
차경현, 김영우, 박희찬, 김광호
요업학회지 30권 9호 701-708(8pages)

Pd-doped SnO2 thin films for hydrogen gas sensing were fabricated by reactive fo magnetron sputtering and were studied on effects of film thickness and Pd doping content. Pd doping caused the optimum sensor operation temperature to reduce down to ~25$0^{\circ}C$ and also enhanced gas sensitivity, compared with undoped SnO2 film. Gas sensitivity depended on the film thickness. The sensitivity increased with decreasing the film thickness, showing maximum sensitivities at the thickness of 730$\AA$ and 300~400$\AA$ for the undoped SnO2 and the Pd-doped SnO2 film, respectively. Further decrease of the film thickness beyond these thickness ranges, however, resulted in the reduction of sensitivity again.

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