The vacuum evaporated Au films on soda-lime glasses were measured by the electrical conductivity with the variation of the annealing time, relative humidity, and temperature. Au films structures were observed by scanning Electron Microscope and X-ray Diffractometer. As the annealing time and temperature increased, the electrical conductivity was increased due to the migration or annihilation of defects, but the electrical conductivity was decreased as with the relative humidity increased. Au films by XRD and SEM examination showed the negligible effect of chemical reactions.