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기저판의 탄성에 따른 유연촉각센서의 성능변화 연구
Study on the Performance of Flexible Tactile Sensors According to the Substrate Stiffness
김송호, 김호찬, 이인환
DOI http://dx.doi.org/10.14775/ksmpe.2021.20.09.104

Tactile sensors and integrated circuits that detect external stimuli have been developed for use in variousindustries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process inwhich metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highlybrittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based onpolydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currentlybeing developed as an alternative to overcome these limitations. In this study, a manufacturing process ofpressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexibletactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on asubstrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance ofpressure-sensitive materials according to the modulus of elasticity of the substrate.

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