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AlN piezoelectric materials for wireless communication thin film components
Ju-Hyung Kim, Si-HyungLee, Jin-HoAhn, Jeon-KookLee
UCI G704-001111.2002.3.1.008

The numerical simulation of ceramic drying process is difficult as the heat and moisture movements in green ceramics caused by temperature gradients, moisture gradients, conduction, convection and evaporation should be considered. In the finite element formulation for solving temperature and moisture distributions during the drying process, the internally discontinuous interface elements are employed to avoid the numerical divergence problem arising from sudden changes in heat capacity in phase zones. In order to show the reliability of the numerical method proposed in this study, the drying process of a ceramic electric insulator is simulated and the results are compared with those of other investigators.

A Bragg reflector type FBAR using AlN piezoelectric with quarter wavelength thickness has been fabricated, where the Bragg reflector was composed of W-SiO2 pairs. By numerical simulation, considering actual acoustic losses of each layer, an analysis of the frequency response of the resonator has been made and this could be explained using an equivalent circuit with parasitic elements. The Effective electromechanical coupling constant ( ) and the Quality factor (Qs), figures of merit of the resonator, were about 1.1% and 307, respectively.

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