We present a self-consistent numerical method for
calculating the conduction-band profile and subband
structure of AlGaN/GaN single heterojunctions. The
subband calculations take into account the piezoelectric and
spontaneous polarization effect and the Hartree and
exchange-correlation interaction. We calculate the
dependence of electron sheet concentration and subband
energies on various structural parameters, such as the
width and Al mole fraction of AlGaN, the density of donor
impurities in AlGaN, and the density of acceptor impurities
in GaN, as well as the electron temperature. The electron
sheet concentration was sensitively dependent on the Al
mole fraction and width of the AlGaN layer and the doping
density of donor impurities in the AlGaN. The calculated
results of electron sheet concentration as a function of the Al
mole fraction are in excellent agreement with some
experimental data available in the literature.