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고려대학교 공학기술연구소
공학기술연구소보
The electrical properties of Al/TiN/Ti/Si contact according to post annealing
The electrical properties of Al/TiN/Ti/Si contact according to post annealing
( Man Young Sung )
고려대학교 공학기술연구소
1997.12
공학기술연구소보
vol. 4
115-115(1pages)
UCI
I410-ECN-0102-2009-530-008003595
₩ 1,000
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