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Nanosheet Tunneling FETs의 양극성 전류 감소를 위한 이종 게이트 절연막의 적용
Study on Hetero Gate Dielectrics to Reduce Ambipolar Current in Nanosheet Tunneling FETs
김아영 ( A-young Kim ) , 방다은 ( Da-eun Bang ) , 박효준 ( Hyo-jun Park ) , 길태현 ( Tae-hyun Kil ) , 연주원 ( Ju-won Yeon ) , 이문권 ( Moon-kwon Lee ) , 윤의철 ( Eui-cheol Yun ) , 김민우 ( Min-woo Kim ) , 전수진 ( Su-jin Jeon ) , 김문석 ( Moon-seok Kim ) , 박준영 ( Jun-young Park )
DOI 10.4313/JKEM.2025.38.3.9

Aggressive device scaling has severely degraded the switching characteristics of CMOS transistors. This issue has led to the development of tunneling FETs (TFETs) as an alternative. TFETs, with their asymmetric doping of the source and drain regions, offer improved subthreshold swing (SS) compared to conventional MOSFETs. However, despite this advantage, TFETs still suffer from ambipolar current, which increases off-state current (IOFF). This paper introduces an approach to applying hetero gate dielectrics (HGDs) in nanosheet (NS) TFETs to reduce ambipolar current characteristics. The magnitude of the drain electric field is reduced by selectively forming a high-k dielectric near the source region This configuration allows the TFETs to avoid unintended band-to-band tunneling (BTBT) and suppress ambipolar current during the off-state.

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[자료제공 : 네이버학술정보]
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