Purpose: Measurement results obtained under non-ideal measurement environment conditions may contain uncertain factors. As a result, the reliability of measurement results may be deteriorated. In this study, we tried to find ways to improve quality by evaluating and applying measurement uncertainty based on GUM. Methods: In the flatness measurement of semiconductor parts, uncertainty factors that could occur under actual environmental conditions of workers were derived, and measurement uncertainties were calculated, and methods for minimizing the main factors affecting the measurement results were analyzed. Results: Depending on the part and the coordinate measuring machine, it was shown that the effect of dispersion caused by repeated measurements as type A uncertainty and the effect of the calibration results of equipment as type B uncertainty have the main influence. Conclusion: Depending on the uncertainty factors of type A and type B and the influence of the total expanded uncertainty, the central value and confidence interval of the initial measurement results showed fluctuations. It is considered that analysis and measures for the main uncertainty factors are needed as quality improvement in the industrial field.