We have designed and fabricated coil structures by gold electroplating technique. The thickness, width, and length are 7 ㎛, 20 ㎛, and 1.6 m, respectively. With vibrating a magnet on the surface of a fabricated electroplated coil, the micro power generator produce an alternating voltage. We have changed the vibrational frequency from 0.5 ㎐ to 8 ㎐. The generated voltage was 106 ㎷ at 3 ㎐ and 198 ㎷ at 6 ㎐. We have rectified and stepped up the input voltage using a quadrupler circuit. After using the step up circuit, the measured voltage was 81 ㎷ at 3 ㎐ and 235 ㎷ at 6㎐.
