The objective of this study was to investigate delayed oxygen evolution and localized corrosion resistance of titanium alloys by performing potentiodynamic polarization, potentiostatic polarization, and Mott-Schottky measurements. Delayed oxygen evolution was compared among titanium alloys, 316 stainless steel, and platinum. Difference in delayed oxygen evolution between titanium alloys and other metals was attributed to specific surface characteristic of each metal. Delayed oxygen evolution of titanium alloys resulted from the predominant process of ionic conduction over electronic conduction. The effect of oxygen evolution on localized corrosion of titanium alloys was investigated using electrochemical critical localized corrosion temperature (E-CLCT) technique. Mott-Schottky measurement was performed to clarify the difference in film properties between titanium alloys and stainless steels. Titanium alloys were found to have much lower donor density than stainless steels by 1/28. These results indicate that delayed oxygen evolution has little influence on the concreteness of passive film and the resistance to localized corrosion of titanium alloys.