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한국공업화학회
한국공업화학회 연구논문 초록집
노즐 형태의 HCRT MOCVD에 의한 티타늄 산화막 증착
노즐 형태의 HCRT MOCVD에 의한 티타늄 산화막 증착
김경수 , 정일현
한국공업화학회
2005.10
한국공업화학회 연구논문 초록집
vol. 2005 iss. 1
110-110(1pages)
UCI
I410-ECN-0102-2021-500-001175945
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