We studied the electro-optical characteristic of vertical alignment liquid crystal display(VA-LCD) on the SiOx thin film deposited 45° oblique by rf magnetic sputtering system. LC alignment characteristic showed homeotropic alignment, and pretilt angle was about 90°. A uniform liquid crystal alignment effect on the SiOx thin film was achieved and the electro-optical characteristic of the SiOx thin film deposited 45° oblique by rf magnetic sputtering system was excellent.