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수직 방향 전류를 이용한 폴리실리콘 포토다이오드에 관한 연구
Investigation of Polycrystalline Silicon Photodiodes Utilizing Vertically Directed Current Path
송영선 ( Young Sun Song ) , 윤일구 ( I1 Gu Yun )
UCI I410-ECN-0102-2015-500-001804642
이 자료는 4페이지 이하의 자료입니다.

In this paper, the polycrystalline silicon photodiodes utilizing vertically directed current path are investigated. The location of electrodes is considered with the grain direction and the current path. The relationships between grain boundaries and characteristics of photodiode are simulated to apply the vertically grown polycrystalline silicon to photodiodes. From the results, the vertically grown polycrystalline silicon photodiode is a potential candidate for CMOS image sensor. However, the increment of dark current related to graain boundaries should be reduced.

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