BSCCO:2212-2223 thin films were fabricated by using the ion beam sputter with a evaporation method at various substrate temperatures, T(sub), and ozone gas pressures, pO3. The correlation diagrams of the BSCCO phases with Tsub and pO3 are established in the 2212 and 2223 compositional films. In spite of 2212 compositional sputtering, Bi2201 and Bi2223 as well as Bi2212 phases come out as stable phases depending on Tsub and pO3. From these results, the thermodynamic evaluation of ΔH and ΔS, which are related with Gibbs`` free energy change for single Bi2212 or Bi2223 phase, was performed.