Silicon carbide ceramics have high hardness, high thermal conductivity, low thermal expansion coefficient, and high thermal-shock resistance. They have superior heat-resistance, wear-resistance, and corrosion-resistance as well. They have good thermal property such that room temperature strength is maintained up to 1400 degree C. But they have covalent bonding, and are not easy to be consolidated. In this research, silicon carbide coating films were prepared using liquid phase process instead of vapor phase process. Polymer precursors with solvent and some additives were used for the liquid phase process. Plasticizer, binder, nanopowders, or short fibers were used for the additives. It was found that the film crack generation was avoided even though the thickness became larger than one micrometer when short fibers were added as reinforcements.