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반도체 : 능동 폴리머 펜 어래이를 이용한 미세 패터닝
Regular Paper : Micro Patterning Using Active Polymer Pen Array
한윤수 ( Yoon Soo Han ) , 홍지화 ( Ji Hwa Hong )
UCI I410-ECN-0102-2014-500-001811778

We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run. The largest proof-of-concept array fabricated is 4×4 with a spacing of 250 μm in both x and y axes.

[자료제공 : 네이버학술정보]
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