This study was performed to compare the uncertainty of elemental analysis methods and the species of elements that can be analyzed using ICP (Inductively Coupled Plasma spectrometry), PIXE (Proton Induced Xray Emission), and XRF (X-Ray Fluorescence) for the PM2.5 (dp < 2.5 μm) filter samples. From this study, the XRF method has been proved to be the best way of elemental analysis for PM2.5. The XRF method has relatively detected very low uncertainty values compared to the PIXE except for Na and Mg. The number of elements measured above the limits of detection for ICP, PIXE, and XRF were 10, 12, and 23, respectively. Using the ICP method, Si, S, Zn, and Cu elements were not detected. In the case of PIXE method, the important indicator elements for the CMB (chemical mass balance) receptor model, such as Na, Mg, Cl, Cu, Br, and Ni, were not detected. However, all of these elements were detected using the XRF method.