18.97.14.88
18.97.14.88
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Fabrication of 1 μm Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method
( Seung Min Oh ) , ( Min Gyu Kang ) , ( Young Ho Do ) , ( Chong Yun Kang ) , ( Seok Jin Yoon ) , ( Sahn Nahm )
UCI I410-ECN-0102-2012-560-002826739
This article is 4 pages or less.

Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150℃, 350℃ and 650℃. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm.

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