18.97.9.171
18.97.9.171
close menu
Accredited
Current Spreading Layer와 에피 영역 도핑 농도에 따른 4H-SiC Vertical MOSFET 항복 전압 최적화
Optimization of 4H-SiC Vertical MOSFET by Current Spreading Layer and Doping Level of Epilayer
구상모 ( Sang Mo Koo ) , 문경숙 ( Kyoung Sook Moon ) , 안정준 ( Jung Joon Ahn )
UCI I410-ECN-0102-2012-560-001397931
This article is 4 pages or less.

In this work, we investigated the static characteristics of 4H-SiC vertical metal-oxide- semiconductor field effect transistors (VMOSFETs) by adjusting the doping level of n-epilayer and the effect of a current spreading layer (CSL), which was inserted below the p-base region with highly doped n+ state (5 x 1017 cm-3). The structure of SiC VMOSFET was designed by using a 2-dimensional device simulator (ATLAS, Silvaco Inc.). By varying the n-epilayer doping concentration from 1×1016 cm-3 to 1×1017 cm-3, we investigated the static characteristics of SiC VMOSFETs such as blocking voltages and on-resistances. We found that CSL helps distribute the electron flow more uniformly, minimizing current crowding at the top of the drift region and reducing the drift layer resistance. For that reason, silicon carbide VMOSFET structures of highly intensified blocking voltages with good figures of merit can be achieved by adjusting CSL and doping level of n-epilayer.

[자료제공 : 네이버학술정보]
×