여러 탄화조건에 따라 성장된 단결정 3C-SIC 박막의 특성

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Properties of Single Crystalline 3C-SIC Thin Films Grown with Several Carbonization Conditions

심재철 ( Jae Cheol Shim ) , 정귀상 ( Gwiy Sang Chung )

한국전기전자재료학회 2010.11

전기전자재료학회논문지(J. Korean Inst. Electr. Electron. Mater. Eng.) vol. 23 iss. 11 837-842(6pages)

UCI I410-ECN-0102-2012-560-001491741

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[자료제공 : 네이버학술정보]