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18.97.9.170
18.97.9.170
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한일 6
TEM Investigation of the Microstructure Evolution during SPC of a - Si , a - Si1 - xGex , a-( Si / Si1 - xGex ) , and a - ( Si1 - xGex/Si ) layers
( Ki Bum Kim ) , ( Myung Kwan Ryu )
UCI I410-ECN-0102-2009-580-009426041
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