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TiO2/ZnS/Ag/ZnS/TiO2 다층막의 PDP 필터용 전극 특성
Regular Paper : Transparent Electrode Performance of TiO2/ZnS/Ag/ZnS/TiO2 Multi-Layer for PDP Filter
오원석 ( Won Seok Oh ) , 이서희 ( Seo Hee Lee ) , 장건익 ( Gun Eik Jang ) , 박성완 ( Seong Wan Park )
UCI I410-ECN-0102-2012-510-001395715
This article is 4 pages or less.

The TiO2/ZnS/Ag/ZnS/TiO2 multilayered structure for the transparent electrodes in plasma display panel was designed by essential macleod program (EMP) and the multilayered film was deposited on a glass substrate by direct-current (DC)/radio-frequency (RF) magnetron sputtering system. During film deposition process, the Ag layer in TiO2/Ag/TiO2 structure became oxidized and the filter characteristic was degraded easily. In this study, ZnS layer was adopted as a diffusion blocking layer between TiO2 and Ag to prevent the oxidation of Ag layer efficiently in TiO2/ZnS/Ag/ZnS/TiO2 structure. Based on the AES depth profiling analysis, the Ag layer was effectively protected by the ZnS layer as compared with the TiO2/Ag/TiO2 multilayered films without ZnS as an antioxidant layer. The 3 times stacked TiO2/ZnS/Ag/ZnS/TiO2 films have low sheet resistance of 1.22 Ω/□ and luminous transmittance was as high as 62% in the visible ranges.

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