POSTER 발표A : DRAM 소자용 PLZT 박막의 두께에 따른 전기적 특성에 관한 연구

A Study on Electrical Characteristics of the PLZT Thin Film Acorrding to Thickness for DRAM Capacitor

박용범(Yong Bum Park),장낙원(Nak Won Jang),마석범(Suk Bum Mah),김성구(Seong Goo Kim),최형욱(Hyung Wook Choi),박창엽(Chang Yub Park)

한국전기전자재료학회 1999.01

한국전기전자재료학회 추계학술대회논문집 vol. 1999 278-281(4pages)

UCI I410-ECN-0102-2009-560-007522366

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