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한국센서학회
센서학회지
다결정 실리콘 카바이드를 이용한 마이크로 유량센서
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다결정 실리콘 카바이드를 이용한 마이크로 유량센서
Micro flow sensor using polycrystalline silicon carbide
이지공 ( Ji Gong Lee ) , 이성필 ( Sung Pil Lee ) , ( Man I Lei ) , ( Srihari Rajgopal ) , ( Mehran Mehregany )
한국센서학회
2009.03
센서학회지
vol. 18 iss. 2
147-153(7pages)
UCI
I410-ECN-0102-2009-530-020036449
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Flow sensor
silicon carbide
thermistor
MEMS
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