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BTMSM/O2 유량변화에 따른 SiOCH 박막의 저유전 특성
Properties of SiOCH Thin Film Low Dielectric by BTMSM/O2 Flow Rates
박인철 ( In Cheol Park ) , 김홍배 ( Hong Bae Kim )
UCI I410-ECN-0102-2009-560-019988916
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