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고려대학교 공학기술연구소
工學 論文集
GAIVBE 기법에 의한 저온 탄탈륨 산화막의 형성에 관한 연구
GAIVBE 기법에 의한 저온 탄탈륨 산화막의 형성에 관한 연구
A Study on the Growth of Tantalum Oxide Films with Low Temperature by GAIVBE Technique
성만영(Man Young Sung),박성희(Sung Hee Park),김종열(Jong Ryeul Kim),박정훈(Jung Hoon Park),강호철(Ho Cheol Kang)
고려대학교 공학기술연구소
1994.01
工學 論文集
vol. 30
1-9(9pages)
UCI
I410-ECN-0102-2008-530-001262738
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