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고려대학교 공학기술연구소
工學 論文集
Laser CVD SiON 막의 형성조건에 따른 Si-SiON 계면특성
Laser CVD SiON 막의 형성조건에 따른 Si-SiON 계면특성
The Si-SiON Interface Characteristic dependence on Laser CVD Film deposition conditions
성영권(Yung Kwon Sung),박근영(Geun Young Park),이한신(Han Shin Lee),이계신(Kye Shin Lee),이종길(Jong Gil Lee)
고려대학교 공학기술연구소
1993.01
工學 論文集
vol. 29
59-65(7pages)
UCI
I410-ECN-0102-2008-530-001262809
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