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18.97.14.81
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고려대학교 공학기술연구소
공학논문집
Al-Cu 합금 배선에서의 Electromigration Failure 개선에 관한 연구
Al-Cu 합금 배선에서의 Electromigration Failure 개선에 관한 연구
A Study on the Improvement of Electromigration Failure in Al-Cu Alloyed Metal Line
추교섭(Kyo Seop Chu),신상우(Sang Woo Shin),김상영(Sang Young Kim),김종관(Jong Kwan Kim),성영권(Young Kwon Sung)
고려대학교 공학기술연구소
1996.01
공학논문집
vol. 32
163-168(6pages)
UCI
I410-ECN-0102-2008-530-001265633
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