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18.97.14.82
한국어
ENG
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한국공업화학회
공업화학
제조 방법에 따른 Titanium Disilicide 막의 특성
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제조 방법에 따른 Titanium Disilicide 막의 특성
The Characteristics of Titanium Disilicide Films following Manufacturing Methods
모만진(Man Jin Mo), 전법주(Bup Ju Jeon), 정일현(Il Hyun Jung)
한국공업화학회
1999.05
공업화학
vol. 10 iss. 3
354-361(8pages)
UCI
I410-ECN-0102-2008-570-001219102
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