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Candidate SCIE SCOPUS
RF Sputter 방법을 이용하여 Polyester 기판 위에서 성장시킨 Ag 박막의 공정조건과 물리적 특성에 관한 연구
A Study of Ag Film Properties Grown by Sputtering on the Substrate of Polyester in Relation with its Process Parameters
이의재(Eui Jae Ri)
UCI I410-ECN-0102-2008-580-001196600

Thin reflective Ag films are synthesized by using sputter methods. For the purposes of improving the reflectance and adhesion of such films, particularly, the substrate bias voltages were applied during sputtering. We succeeded in fabricating a quality silver film which possesses an adhesion of 50 Kgf/㎠ and a high reflectivity of more than 96%. Both of reflectivity and adhesion are better in case of bias sputtering as controlled than nonbias sputtering, specifically the bias of 50-100 V has been shown most effective. The microstructures of sample films were examined by using various techniques and the XRD spectrum in particular showed that $lt;111$gt; direction was the preferred growth orientation.

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