It is known that Pd shows a lower crystallization temperature and a faster metal-induced lateral crystallization rate than Ni. However, Pd-MILC cannot be used for the fabrication of thin film transistors (TFTs), due to its unacceptable crystal quality. In this study, a mixture of Pd and Ni was used as a catalyst in MILC in an attempt to obtain high-quality poly crystals with an enhanced crystallization rate at a low crystallization temperature. The effect of the amount of Pd additive on the Ni-MILC behavior was systematically investigated. It was found that optimal TFT performance could be obtained when 5% by volume of Pd is added to a Ni catalyst. The On/Off ratio and electrical mobility were observed to be 10(-6) and more than 20 ㎠/Vs, respectively, which are quite acceptable for practical use.