Analysis and Improvement of Dynamics Characteristic of 3-axis Nano Stage
김충 ( Choong Kim ) , 이강녕 ( Kang Nyung Lee ) , 이동주 ( Dong Ju Lee ) , 이문구 ( Moon Gu Lee ) , 최형길 ( Hyoung Gil Choi ) , 이석원 ( Suk Won Lee ) , 박노철 ( No Cheol Park ) , 박영필 ( Young Pil Park )