A transparent and colorless 80 SiO₂-20TiO₂(mol%) thin films on soda-lime-silica slide glass and sapphire substrate were obtained by spin-coating technique using tetraethyl orthosilicate and titanium trichloride as starting materials. The prepared film annealed at 750℃ showed a high transmittance and a low reflectance. For the SiO₂-TiO₂ films on slide glasses, a strong interaction between the sodium ion and oxygens is properbly the origin of the good stability to the high temperature and the high humidity.