18.97.14.84
18.97.14.84
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스핀 코팅에 의한 In2O3 박막의 가스 감지특성
Gas sensing properties of In2O3 thin film perpared by spin - coating method
정완영 , 임준우 , 이덕동 , 노보루야마조에 ( Wan Young Chung , Jun Woo Lim , Duk Dong Lee Noboru Yamazoe )
센서학회지 vol. 7 iss. 2 117-123(7pages)
UCI I410-ECN-0102-2008-530-001331105

The In₂O₃ thin films were fabricated on a alumina substrate by spin-coating method and the gas sensing properties were tested. The coating solution was synthesized by the mixing of aqueous solution of In(OH)₃ and acetic acid, and ammonium carboxymethyl cellulose as a binder. The In₂O₃ thin films between 71 and 210nm thick were obtained by spin-coating between 1 and 7 times followed by drying at 110 ℃ and calcining at 600 ℃. The films consisted of a dense stack of tiny In₂O₃ particles between 23 and 27nm in diameter and covered well large grains of the alumina substrate. Then film thickness was well controlled by the number of spin-coating. The fabricated In₂O₃ films showed high sensitivity and very fast response property to CO and Hz.

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