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압저항형 압력센서를 위한 BiCMOS 신호처리회로의 설계
Design of BiCMOS signal conditioning Circuitry for Piezoresistive Pressure sensor
이보나 , 이문기 ( Bo Na Lee , Moon Key Lee )
UCI I410-ECN-0102-2008-530-001331983

In this paper, we have designed signal conditioning circuitry for piezoresistive pressure sensor. Signal conditioning circuitry consists of voltage reference circuit for sensor driving voltage and instrument amplifier for sensor signal amplification. Signal conditioning circuitry is simulated using HSPICE in a single poly double metal 1.5um BiCMOS technology. Simulation results of band-gap reference circuit showed that temperature coefficient of 21 ppm/℃ at the temperature range of 0 - 70℃ and PSRR of 80 dB. Simulation results of BiCMOS amplifier showed that do voltage gain, offset voltage, CMRR, CMR and PSRR are outperformed to CMOS and Bipolar, but power dissipation and noise voltage were more improved in CMOS than BiCMOS and Bipolar. Designed signal conditioning circuitry showed high input impedance, low offset and good CMRR, therefore, it is possible to apply sensor and instrument signal conditioning circuitry.

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