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저압에서의 선형성을 향상시키기 위한 압력센서의 설계
A Design of Pressure Sensor for Improving Linearity at Low Pressure Range
이보나 , 이문기 ( Bo Na Lee , Moon Key Lee )
UCI I410-ECN-0102-2008-530-001332440

In this paper, We have designed silicon pressure sensor with center-bossed diaphragm which improving sensitivity and linearity by reducing diaphragm deflection. Designed center-bossed pressure sensor showed maximum deflection of 0.125㎛, maximum stress of 2.24 x 10^7 Pa and sensitivity of 27.67 mV/V.psi. As a result, diaphragm deflection was reduced to 1/160 that of diaphragm thickness and 1/35 that of square diaphragm. Also, sensitivity was increased 19 times compared to square diaphragm.

[자료제공 : 네이버학술정보]
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