18.97.14.82
18.97.14.82
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영상센서를 위한 비정질 실리콘 박막트랜지스터의 제작 및 특성
Fabrication and Characteristics of a-Si : H TFT for Image Sensor
김영진 , 박욱동 , 김기완 , 최규만 ( Young Jin Kim , Wug Dong Park , Ki Wan Kim , Kyu Man Choi )
UCI I410-ECN-0102-2008-530-001333467

a-Si : H TFTs for image sensor have been fabricated and their operational characteristics have been investigated. Hydrogenated amorphous silicon nitride(a-SiN : H) films were used for the gate insulator and n^+-a-Si : H films were depostied for the source and drain contact. The thicknesses of a-SiN : H and a-Si : H films were 2000 Å, respectively and the thickness of n+-a-Si : H film was 500 Å. Also the channel length and channel width of a-Si : H TFTs were 50 ㎛ and 1000 ㎛ respectively. The ON/OFF current ratio, threshold voltage. and field effect mobility of fabricated a-Si : H TFTs were 10^5, 6.3 V, and 0.15 ㎠/V·s, respectively.

[자료제공 : 네이버학술정보]
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