본문 바로가기
18.97.9.173
18.97.9.173
ECR - PECVD PZT 박막의 전기적 특성에 대한 전극의 영향
Effects of Electrode on the Electric Properties of PZT Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition
이원종 ( Won Jong Lee )
UCI I410-ECN-0102-2008-580-001199545
×