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대한금속재료학회
대한금속학회회보
저유전상수 폴리이미드 위에 형성된 Al 박막의 일렉트로마이그레이션 특성 연구
저유전상수 폴리이미드 위에 형성된 Al 박막의 일렉트로마이그레이션 특성 연구
Electromigration Characteristics of Al Thin Films Deposited on Low Dielectric Polyimide
은병수 , 김영호 ( Byung Soo Eun , Young Ho Kim )
대한금속재료학회
1998.01
대한금속학회회보
vol. 11 iss. 5
510-520(11pages)
UCI
I410-ECN-0102-2008-580-001199570
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