Fe₂O₃-TiO₂artificial passive films were formed at formation temperatures of 200∼300℃ by low pressure MOCVD technique. The relationship between formation temperature and corrosion of the Fe₂O₃-TiO₂films was examined in acid solutions. Fe₂O₃-TiO₂ films deposited above 300℃ were crystalline and the films deposited below 250℃ were amorphous. The dissolution rate of the Fe₂O₃-TiO₂films deposited at 200 and 250℃ decreased with increasing the formation temperature in 5 M-HCl, but the films deposited at 300 and 350℃ hardly dissolved in the solution. The films deposited at 200 and 250℃ easily dissolved at cathodic potentials in 1 M H₂SO₄ and HCl owing to the selective reduction of iron oxide components in the films. But, the selective reduction in the films deposited at 300 and 350℃ was suppressed. The Fe₂O₃-TiO₂ films deposited above 300℃ have higher corrosion resistance than that of the films deposited below 250℃, because the former have high crystallinity and contain high chemical resistant oxides.