개량형 대향타겟스퍼터장치에 의한 Co-Cr 박막의 미세구조

Microstructure of Co-Cr Thin Films Deposited by Improved Facing Targets Sputtering System

김경환(Kyung Hwan Kim), 손인환(In Hwan Son), 김명호(Myung Ho Kim), 김재환(Jae Hwan Kim), 중천무수(S . Nakagawa), 직강정언(M . Naoe)

한국전기전자재료학회 1998.01

한국전기전자재료학회 춘계학술대회논문집 vol. 1998 363-366(4pages)

UCI I410-ECN-0102-2008-560-001247815

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