Effects of H2 sintering and Pt upper electrode on metallic Bi content in Sr0.9Bi2.1Ta2O9 thin films for ferroelectric memories prepared by sol - gel method

I . Koiwa; T . Kanehara; H . Kato

한국전기전자재료학회 E²M-전기 전자와 첨단 소재 Effects of H2 sintering and Pt upper electrode on metallic Bi content in Sr0.9Bi2.1Ta2O9 thin films for ferroelectric memories prepared by sol - gel method

( I . Koiwa , T . Kanehara , H . Kato )

한국전기전자재료학회 1998.12

E²M-전기 전자와 첨단 소재 vol. 11 iss. 12 79-80(2pages)

UCI I410-ECN-0102-2008-560-001249051

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