Influence of the Purity of Source Precursors of the Electrical Properties of Pb(Zr,Ti)O3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition

Masahiro Yoshida; Masaru Shimizu; Hirohiko Niu; Hironori Fujisawa

한국전기전자재료학회 E²M-전기 전자와 첨단 소재 Influence of the Purity of Source Precursors of the Electrical Properties of Pb(Zr,Ti)O3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition

Influence of the Purity of Source Precursors of the Electrical Properties of Pb(Zr,Ti)O3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition

( Hironori Fujisawa , Masahiro Yoshida , Masaru Shimizu , Hirohiko Niu )

한국전기전자재료학회 1998.12

E²M-전기 전자와 첨단 소재 vol. 11 iss. 12 78-78(1pages)

UCI I410-ECN-0102-2008-560-001249091

More

Cite Copy URL Bookshelf

This article is 4 pages or less.

Abstract

Keywords

Table of Contents

References (0)

[자료제공 : 네이버학술정보]