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한국전기전자재료학회
E²M-전기 전자와 첨단 소재
Laser Recrystallization of Polycrystalline Silicon in Recessed Structures
Laser Recrystallization of Polycrystalline Silicon in Recessed Structures
( G . K . Giust , T . W . Sigmon )
한국전기전자재료학회
1998.12
E²M-전기 전자와 첨단 소재
vol. 11 iss. 12
76-76(1pages)
UCI
I410-ECN-0102-2008-560-001249157
₩ 1,000
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