Regular Paper : Black Silicon Layer Formation using Radio-Frequency Multi- Hollow Cathode Plasma System and Its Application in Solar Cell

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( U. Gangopadhyay ) , ( Kyung Hae Kim ) , ( S. K. Dhungel ) , ( D. Mangalaraj ) , ( J. H. Park ) , ( J. Yi )

한국전기전자재료학회 2003.10

Transactions on Electrical and Electronic Materials vol. 4 iss. 5 10-14(5pages)

UCI I410-ECN-0102-2009-560-003240112

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[자료제공 : 네이버학술정보]