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한국전기전자재료학회
E²M-전기 전자와 첨단 소재
테마 기획 / PVD 기술 3 : RF Helicon Plasma CVD
테마 기획 / PVD 기술 3 : RF Helicon Plasma CVD
김경례 , 신재균 , 현준원
한국전기전자재료학회
1998.10
E²M-전기 전자와 첨단 소재
vol. 11 iss. 10
161-164(4pages)
UCI
I410-ECN-0102-2008-560-001251351
₩ 1,000
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