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한국전기전자재료학회
E²M-전기 전자와 첨단 소재
테마 기획 / PVD 기술 1 : Hollow Cathode Discharge Method
테마 기획 / PVD 기술 1 : Hollow Cathode Discharge Method
김현후 , 박철현 , 배민호
한국전기전자재료학회
1998.10
E²M-전기 전자와 첨단 소재
vol. 11 iss. 10
152-156(5pages)
UCI
I410-ECN-0102-2008-560-001251371
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